Excimer Lasers

Halogen gas mixtures shall normally be stored in ventilated gas storage cabinets. All transfer lines and components in contact with halogens shall be made of compatible (nonreactive) materials. Institutional toxic gas program requirements will designate the specific storage quantities allowed (depending on toxicity and other factors).

Conventional ventilated gas storage cabinets will effectively contain the dilute halogen and hydrogen halide in inert gas mixtures used in excimer lasers if the delivery lines are kept bone-dry. Gas storage cabinet hardware allows this to be done using bone-dry nitrogen purge gas.

 

8 CCR 5191

NFPA 115 8

 

The gas discharge from both the excimer laser and the associated halogen gas storage cabinet shall be connected to an appropriate exhaust ventilation system capable of maintaining an average face velocity of 200 fpm at the cabinet's window opening when the window is fully opened. An alarming airflow meter should be used to monitor and indicate low-flow conditions in the gas cabinet

 

8 CCR 5191

NFPA 115 8

 

Halogen scrubber devices used on closed (nonventilated) excimer laser systems shall meet appropriate safety standards and shall be preapproved by a campus Industrial Hygienist prior to installation.

 

8 CCR 5191

NFPA 115 8