Toxic and Corrosive Gas Storage and Distribution

Treatment systems shall be reviewed and approved by EH&S and shall comply with applicable local environmental regulations. Gas storage cabinets and distribution systems should comply with the following standards:

 

  • Semiconductor Equipment and Materials International, Guide for Secondary Containment of Hazardous Gas Piping Systems, Standard F6-1992 (1992)
  • Semiconductor Equipment and Materials International, Guide for Gas Source Control Equipment, Standard F13-1993 (1993)
  • Semiconductor Equipment and Materials International, Reapproval of F14-93, Guide for the Design of Gas Source Equipment Enclosures Facilities Standards and Safety Guidelines, F14-93
  • Semiconductor Equipment and Materials International, Guide for Gaseous Effluent Handling, F5-90

UC Practice